Below is a copy of the data from the the now-defunct estradasphere.com's show archive, with some additions and corrections from yours truly.
That database seems to not have been updated past November 2003, so this is by no means every show Estradasphere has ever done (though it should be pretty comprehensive of 1999-2003). I've tried to update it past 2003, but finding info on shows from Estradasphere's later years has proven difficult.
The second tab contains data taken from each song's info page on the old site. Whether or not any of it is accurate, I dunno, I didn't write it.
Note that the version of the spreadsheet displayed below may not be fully up-to-date. You can click [here] to open the original version. In the original version, you can view full setlists by clicking on the cell.